Equipment, Foundry Services
Enabling advanced MEMS processing & production
Founded in 2003, memsstar Limited is a technology leader in MEMS processing. Our proprietary process tools and unique process integration know-how add value to customers' efforts in developing the most advanced, high performance and cost effective MEMS devices MEMS etch and surface solutions.
With unique patented processing solutions for HF and XeF2 vapor phase isotropic etch and surface modification, memsstar® offers a wide range of MEMS deposition and etching products including fabrication equipment, applications support, system installations, warranty and post-warranty coverage. These solutions, together with our 400 man-years of MEMS technology experience, ease the path to integrating next-generation release schemes into productive and reliable process flows.
memsstar® systems and technologies enable MEMS fabrication with multiple technologies and nano-materials on the same device. The result is the most competitive research, commercial R&D and production solution in the global MEMS manufacturing industry, whether for current or next-generation applications.
Leadership from firm foundations
The in depth industry knowledge underpinning memsstar Limited is derived from its extensive experience in supplying a broad range of plasma etch and plasma deposition solutions on standard semiconductor process platforms. In 2004 it established a separate division to focus on MEMS processing technologies and the overall specific needs of the rapidly developing MEMS industry while Semiconductor processing and equipment solutions continue under the banner of our pt35 division.
memsstar® delivered its first vapor-phase processing system in 2006 and systems are now in use globally. In addition the company continues to broaden its product range and process technologies to match the developing needs of the MEMS industry.