For more than 35 years Plasma-Therm’s products offered key etch and deposition solutions to a variety of complex specialty technical markets. From deep silicon etch (DSE™) processes to plasma enhanced chemical vapor deposition (PECVD) systems, our equipment produces accurate and highly repeatable results. Our customizable loading options make our tools an ideal match for any production capacity requirement ranging from R&D labs through high production business. All of our products are supported by an award winning service team to ensure high uptime with quality results and overall customer satisfaction. We hold over 24 patents for innovation in plasma process technologies.