Akrion Systems

Akrion Systems provides advanced surface preparation process solutions and systems, including single-wafer and batch-immersion cleaning tools for the microelectronic, display and photovoltaic industries. Akrion Systems' customers produce a diverse range of products, including solar cells, integrated circuits for DRAM, Flash, Logic and MEMS as well as new and reclaimed semiconductor wafers, flat panel displays, and photomasks.

MEMS Applications include:

• Pit or Cavity Etch (TMAH or KOH) • Etch-Through Process (TMAH or KOH) • Selective Etch (HF or BOE) • Sloped Metal Etch (PAN – Phosphoric Acetic Nitric) • Standard IC processes customized for MEMS devices including Pre-diffusion Clean, Resist Strip and Nitride Etch