Theodore Chi


75 Robin Hill Road

Santa Barbara, CA 93117 USA


(805) 681-2800


(805) 967-2677



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Innovative Micro Technology (IMT)

Foundry Services

IMT was formed in 2000, specifically to produce MEMS (micro-electromechanical systems) devices. IMT’s 130,000 sq ft facility contains a 30,000 sq ft Class 100 clean room/fab, the largest and best-equipped independent MEMS fab in the world. The company was built for high-volume manufacturing, and provides complete foundry services from design through production. IMT currently has >30 customers in diverse applications

Markets Served: IMT serves a diverse market, currently serving aerospace, consumer, industrial, biotech, biomedical, RF, optotelecom, etc. IMT offers its services to anyone interested in manufacturing MEMS.

Competitive Advantage: Expertise in all areas of complex MEMS, from design, development, and prototyping to volume production with testing, metrology, failure analysis, and ISO 9001 (SQC/SPC). Specific examples of capabilities and technologies includes sub-micron resolution lithography, hermetic wafer-level packaging (WLP) with vacuum down to 1 mTorr, metal-filled isolated through-wafer vias (TWV, also known as TSV for lower loss, interconnect, and reducing device footprint with increased reliability and lifetime), 3D microfluidics, and materials flexibility.