XACTIX

XACTIX, Inc. develops and produces equipment for manufacturing micro electromechanical systems (MEMS).

Manufacturing MEMS devices requires adding new manufacturing steps to the standard IC process. These new steps require new, specialized equipment to maximize yield and productivity. XACTIX leverages its unique combination of expertise in instrument and equipment design, semiconductor materials processing, micro machining and fabrication, and MEMS manufacturing to design and build leading-edge MEMS process equipment.

XACTIX is the manufacturer of the Xetch® xenon difluoride etching systems. This dry isotropic etching tool is popular in the MEMS community due to high selectivity to silicon versus many standard films including photoresist, silicon dioxide, silicon nitride, and aluminum. The Xetch® systems are particularly well suited for release, but is certainly not limited to MEMS applications and is useful for many applications where highly selective isotropic silicon etching is required. XACTIX also offers etching services.