APM MEMS Foundry Service

APM MEMS Foundry Service

*MEMS foundry service on silicon, glass, SOI, and cavity SOI substrates.

*Manufacturing capability includes wafer processes, wafer level encapsulation, special dicing, wafer level probing.

*Post process on CMOS wafers.

Categories: Foundry Services > Design for Manufacturability (DFM) | Feasability | Low Volume Fabrication | Manufacturing Services | Pilot Services | Process Development | Prototyping | Research & Development | Silicon Deep Reactive Ion Etch (RIE) | Technology Transfer to Foundry | Volume Production Ramp | Wafer Bonding |
Professional Services > Inspection | Metrology | Process Design | Shortloop Experimentation |
Manufacturer: Asia Pacific Microsystems
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