MEMS Technologies Dresden

MEMS Technologies Dresden

MEMS Technologies Dresden
At Fraunhofer IPMS customers benefit from both extensive R&D and fabrication know-how and our expertise in a great variety of different fields of application. Scanning mirrors and spatial light modulators are examples for successful cooperation with industry partners. Pressure sensors for the automotive industry or photo diodes are manufactured for years in our clean room.

?? Feasibility Study and Simulation for MEMS products and processes ?? Process Development (6’’, CMOS compatible) ?? ASIC Design & Layout Complete analog, digital and mixed-signal design & simulation Integration of actuators and sensors MEMS-on-CMOS OLED-on-CMOS Tools: Cadence ?? MEMS Design & Layout In-depth know-how in physical domain simulation Reduced order models Tools: ANSYS, COMSOL, MATLAB, SIMULINK, MATHEMATICA, CADENCE ?? Pilot-Fabrication for complete MEMS products ?? Characterization, Test & Reliability Electrical (Analog, Mixed Signal) Non electrical (mechanical, optical) Physical Parameter extraction ?? System design and integration ?? Foundry services for individual processes or sequences

Categories: Advanced Materials > Silicon Wafers |
Equipment > Chemical Vapor Deposition Systems | Deep Silicon Etch Systems | Dry Etch Release | Lithography | Mask Aligner | Packaging | Physical Vapor Deposition (PVD) Systems | Plasma Enhanced Chemical Vapour Deposition (PECVD) | Testing | Wafer Bonding |
Foundry Services > Design | Feasability | Low Volume Fabrication | Manufacturing Services | Metal Via | Modeling | Packaging | Pilot Services | Process Development | Prototyping | Research & Development | Silicon Deep Reactive Ion Etch (RIE) | Technology Transfer to Foundry | Wafer Bonding |
MEMS Devices > Functional Sensors | Optical MEMS | Pressure Sensors |
Other > Cleanroom | Conferences | Education | Information | Research Laboratory |
Professional Services > Design | Inspection | Modeling & Analysis | Packaging | Process Design |
Manufacturer: Fraunhofer IPMS
Model: