Services comprise feasibility studies, simulations of critical parameters and process flows, design, single process development and prototyping to mid size volume production. These include complete electrical and nonelectrical tests and reliability examinations as well as the characterization of microsystems. Beside our know-how in the field of micro scanning mirrors and spatial light modulators we provide broad expertise in manufacturing of standard MEMS such as pressure sensors, photo diodes, ion sensitive field effect transistors and back end for IR thermopiles.