Foundry services for individual processes or sequences

Foundry services for individual processes or sequences

Foundry services for individual processes or sequences
Services comprise feasibility studies, simulations of critical parameters and process flows, design, single process development and prototyping to mid size volume production. These include complete electrical and nonelectrical tests and reliability examinations as well as the characterization of microsystems. Beside our know-how in the field of micro scanning mirrors and spatial light modulators we provide broad expertise in manufacturing of standard MEMS such as pressure sensors, photo diodes, ion sensitive field effect transistors and back end for IR thermopiles.

Categories: Advanced Materials > Silicon Wafers |
Equipment > Chemical Vapor Deposition Systems | Deep Silicon Etch Systems | Dry Etch Release | Lithography | Packaging | Wafer Bonding |
Foundry Services > Design | Feasability | Packaging | Pilot Services | Process Development | Prototyping | Research & Development | Wafer Bonding |
MEMS Devices > Optical MEMS |
Manufacturer: Fraunhofer IPMS
Model: