MSA-500 Micro System Analyzer
The MSA-500 is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS devices. By fully integrating a microscope with Scanning Laser-Doppler Vibrometry, Stroboscopic Video Microscopy and Scanning White Light Interferometry, the Micro System Analyzer is designed with an all-in-one combination of technologies that clarifies real microstructural response and topography.
The All-in-One Solution * Rapid identification and visualization of both system resonances and static topography * Easy integration with MEMS/wafer probe stations * Simple and intuitive operation, measurement ready within minutes
Scanning Laser-Doppler Vibrometry for the Measurement of Out-of-Plane Vibrations * Full-field vibration mapping and broadband, out-of-plane frequency response information * Displays frequency-domain and time-domain data, simplifying transient response analysis * High density sample grids with up to 512 x 512 user-defined measurement points
Stroboscopic Video Microscopy for In-Plane Motion Detection * Stroboscopic video measurement of in-plane motion with frequencies up to 1 MHz * Time-domain displacement measurements with nanometer resolution