Anti-Stiction Coatings for Self-Assembled Monolayers (SAM)

Anti-Stiction Coatings for Self-Assembled Monolayers (SAM)

Dry, vapor phase anti-stiction coatings from memsstar® offer major advantages over alternative wet chemical coatings. In particular, the vacuum deposition environment eliminates issues of moisture variation, crucial in creating repeatable surface modification coatings. Precision-tuned processes, with patented control, reduce the amounts of chemicals used, offer better surface properties and improved surface energy control.

With memsstar®, an anti-stiction coating can be created immediately following the release etching process. This enables the MEMS structure to be treated without breaking process vacuum thereby maximising yield. Our results have consistently demonstrated superior film characteristics, in both durability and coverage. Additional Self-Assembled Monolayer (SAM) Coatings

Our expertise and systems for surface preparation and deposition extends beyond anti-stiction coatings, spaning hydrophobic anti-stiction precursors, anti-wear coatings, such as Al2O3 and TiO, hydrophilic treatments for anti-fouling, microfluidics and bio-inert implantable devices; as well as bio-active coatings. Self-assembled monolayers (SAM) are produced in a two-stage process that combines plasma activation with surface deposition – all precisely controlled and monitored with our innovative, patented systems.

memsstar® processes are the ideal solution for advanced surface engineering, and deliver reliable, cost effective processing.

Categories: Equipment > Chemical Vapor Deposition Systems | Coating | Molecular Vapor Deposition (MVD®) |
Foundry Services > Process Development | Research & Development |
Manufacturer: memsstar
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