memsstar's Sentry platform builds on the standalone Solo platform by adding automated wafer handling to a standalone process module for low volume MEMS production.
The single wafer vacuum loadlock can be converted and upgraded to a full automated system as business or technology needs change - without losing the original investment.
Semi-automated processing with Sentry dramatically improves cycle time between wafers, providing the ideal level of productivity for commercial development and low-volume production.
There is a choice of process modules for standard and next-generation MEMS etch, surface preparation and deposition. All process modules are based on memstar’s unique technologies for advanced process control, faster process times, denser more robust films, superior within wafer uniformity and wafer to wafer repeatability.
Each memsstar® process module uses a small volume vacuum chamber able to process all standard sizes of substrates - 100mm, 125mm, 150mm, 200mm - or many different types of carriers and substrates. Chambers are process specific with an optimized process kit for a particular substrate or design, with excellent process control.
Each system is a compact small footprint and easily connected to cleanroom facilities. Chemicals and electronics are on board for non-toxics so ancillary equipment is minimized. Each system uses industry standard components where possible.