Expertech Compact Thermal Reactor (CTR)
Product Description – The Compact Thermal Reactor (CTR) family of atmospheric and LPCVD lab furnaces is designed to satisfy the stringent requirements of advanced technologies in the development of semiconductor devices, MEMS, optoelectronic devices, and other Nano-materials.
Product Detail – The Expertech Compact Thermal Reactor (CTR) is an advanced tabletop furnace for laboratory, university, R&D, and low volume production users. Expertech’s CTR is a Windows based network capable complete furnace system in the smallest possible footprint. The CTR utilizes discrete and separate chassis sections; electronics section, gas bay section, water cooled element section, and integral automatic cantilever loading mechanism all of which operates in a controlled environment. The isolated and exhausted CTR Gas Bay provides a full suite of atmospheric and LPCVD processes without a Source Cabinet. The CTR cantilever loader does not require a Load Station yet provides programmable controls during push/pull operation. Single phase line voltage conserves energy. Stackable up to 4 furnaces high conserves cleanroom space. Data mining and logging documents development work. Safe. Compact. Efficient. Supported worldwide, the CTR is the ideal furnace for the advanced development community.