Expertech’s VTR 6000, 7000 & 7000PLUS™
VTR (Vertical Thermal Reactor)
Expertech’s VTR 6000, 7000 & 7000PLUS™ vertical furnaces. In addition to re-manufactured systems, Expertech offers upgrades/reconfigurations, spare parts, service and training.
The VTR provides low cost of ownership, process flexibility and high throughput, while meeting multi-generation process requirements.
Production-proven Performance • Over 1,000 systems sold to major IC, MEMS and discrete fabs worldwide • Demonstrated high productivity and reliability • Capable for 100-mm to 200-mm wafer processing • Characterized process models for both Atmospheric and LPCVD processes • Configurations available for temperatures from 400°C to 1150°C
Low Cost of Ownership • Small footprint compared to other vertical furnaces • Up to 150 product wafer load • Dual Boat configuration allows for optimum throughput (non-productive load and unload times become transparent to the cycle time, reducing overhead time) • Optional 6 (SMIF), 12 or 16 cassette carousel • Optional low O2 environmental control • Simple, Reliable Automation • Designed for maintainability and serviceability • Low parts usage (both consumable and non-consumable)