Micro-Mirror / 2d-Scanner

Micro-Mirror / 2d-Scanner

Categories: Advanced Materials > Bonding Material | Etch Mask | Getters | Glass Frit | Glass Wafers | Packaging | Polishing Slurry | Process Carrier | Protection Coating | Quartz Wafers | Sealing Glass | Silicon Wafers | Structured Wafers and Substrates |
Equipment > Batch develop | Chemical Vapor Deposition Systems | Chemical Vapour Etching (CVE) | Cleaning | Coat Develop and Expose | Coating | Deep Reactive Ion Etching (DRIE) Systems | Deep Silicon Etch Systems | Dry Etch Release | Electroetching | Electroplating | Lithography | Manual Wet Bench | Mask Aligner | Mask and Bonder Aligners | Metal Lift Off | Metrology Instrumentation | Packaging | Physical Vapor Deposition (PVD) Systems | Plasma Enhanced Chemical Vapour Deposition (PECVD) | Plasma Etching Systems | Semi Automated Wet Processing System | Stripping | Testing | Wafer Bonding | Wet etching |
Foundry Services > Design | Feasability | Low Volume Fabrication | Manufacturing Services | Mask Layout | Metal Via | Modeling | Packaging | Pilot Services | Process Development | Prototyping | Research & Development | Silicon Deep Reactive Ion Etch (RIE) | Technology Transfer to Foundry | Through Silicon Via | Wafer Bonding |
MEMS Devices > Accelerometers | Energy | Flow Sensors | Gyroscopes | Optical MEMS | RF-MEMS |
Other > Cleanroom | Research Laboratory |
Professional Services > Consulting | Design | Device Services | Inspection | Mask Layout | Modeling & Analysis | Packaging | Process Design |
Software > Simulation tools |
Manufacturer: Fraunhofer ISIT
Model: