BATCH SPRAY SOLVENT PROCESSOR The PRODUCE200 SOLVENT is capable to handle all solvent and solvent based chemicals up to 95°C. Up to 4 Chemical Storage Tanks allow uninterrupted automated processes including Rinsing and Drying (at 2000RPM). With a capacity of 50 Wafers per run, the PRODUCE 200 SOLVENT achieves a throughout of up to 150 Wafers per Hour.

ADVANTAGES: Automated Dry in - Dry out; Each Wafer - Fresh Chemistry; Repeatable Process Control; 1m x 1,6m Footprint; 80% less DI Water; 80% less Exhaust; Encapsulated System;

APPLICATIONS: Resist Strip; Polymer Removal; Clean;