PRODUCE 200 ACID
BATCH SPRAY ACID PROCESSOR
The PRODUCE 200 ACID is capable to handle all acid and base materials up to 130°C.4 Chemical Storage Tanks allow uninterrupted automated processes including Rinsing and Drying. An optical End-Point Detection System ensures the required Run-to-Run performance. With a capacity of 50 Wafers per run, the PRODUCE200 Acid achieves a throughout of up to 120 Wafers per Hour.
ADVANTAGES: Automated Dry in - Dry out; 4 Chemicals in one Sequence; Repeatable Process Control; 1m x 1,6m Footprint; 80% less Water; 80% less Exhaust; Encapsulated System
APPLICATIONS: Etch; Strip; Clean; SicOzone™