MEMS Foundry Services

MEMS Foundry Services

STC offers 150-mm and 200-mm MEMS production capabilities to meet our customers needs for prototype, pilot, low- and mid-volume manufacturing. Our facility is designed to provide maximum flexibility for a wide array of programs and substrate materials including silicon, quartz, metal and polyimides.

STC utilizes the best available microfabrication approaches and production equipment to solve complex challenges in the areas of inertial sensors, biomedial, microfluidics, green technologies, optical displays, SiOB/Thermal Imaging, 3-D integration and wafer-level packaging. Our skilled team can provide support for process transfers / integration where required.

- Chemical Vapor Deposition (CVD) - CMP/Grind - Physical Vapor Deposition - Photolithography - Plasma Etch - Resist Strip - Sacrificial Releases - Wet Processing

Categories: Foundry Services > Design | Low Volume Fabrication | Manufacturing Services | Packaging | Pilot Services | Process Development | Prototyping | Research & Development | Silicon Deep Reactive Ion Etch (RIE) | University Work | Wafer Bonding |
Professional Services > Metrology | Packaging |
Manufacturer: Smart System Technology & Commercialization Center
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