STI3000 Wafer Probe Test System
The STI3000 is a wafer-level MEMS and mixed signal ASIC probe test system that combines several functional STI test equipment blocks for testing gyros, accelerometers, pressure sensors, microphones, resonators, and mixed signal ASICs. At the core of the test system is STI’s proprietary Drive Sense Technology (DST). DST combines unique circuitry, software and test methods to produce the most accurate representation of MEMS sensor dynamic behavior in shorter test times when compared to traditional MEMS probe test methods. The STI3000 can measure most important MEMS characteristics at the wafer level, including resonant frequency, quality factor, stiction, quadrature error, hysteresis, spring constant, f3dB frequency, capacitance and leakage. This dynamic behavior data can then be used to validate MEMS designs, monitor MEMS fabrication processes and drive product quality improvements, resulting in increased wafer- level and package-level test yields and decreased DPM rates, yielding your highest return on investment.