Product Manufacturer
Silicon Wafers

MEMS Technologies Dresden Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Product Manufacturer
Chemical Vapor Deposition Systems

MEMS Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Deep Silicon Etch Systems

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Dry Etch Release

MEMS Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Lithography

MEMS Technologies Dresden Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Mask Aligner

MEMS Technologies Dresden Fraunhofer IPMS
Packaging

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Physical Vapor Deposition (PVD) Systems

MEMS Technologies Dresden Fraunhofer IPMS
Plasma Enhanced Chemical Vapour Deposition (PECVD)

MEMS Technologies Dresden Fraunhofer IPMS
Testing

MEMS Technologies Dresden Fraunhofer IPMS
Wafer Bonding

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Product Manufacturer
Design

Foundry services for individual processes or sequences Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Feasability

MEMS Technologies Dresden Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Low Volume Fabrication

MEMS Technologies Dresden Fraunhofer IPMS
Manufacturing Services

MEMS Technologies Dresden Fraunhofer IPMS
Metal Via

MEMS Technologies Dresden Fraunhofer IPMS
Modeling

MEMS Technologies Dresden Fraunhofer IPMS
Packaging

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Pilot Services

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Process Development

MEMS Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Prototyping

MEMS Technologies Dresden Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Research & Development

MEMS Design & Layout Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Silicon Deep Reactive Ion Etch (RIE)

MEMS Technologies Dresden Fraunhofer IPMS
Technology Transfer to Foundry

MEMS Technologies Dresden Fraunhofer IPMS
Wafer Bonding

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
Product Manufacturer
Functional Sensors

MEMS Technologies Dresden Fraunhofer IPMS
Optical MEMS

MEMS Technologies Dresden Fraunhofer IPMS
Foundry services for individual processes or sequences Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
Pressure Sensors

MEMS Design & Layout Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
MEMS Technologies Dresden Fraunhofer IPMS
Product Manufacturer
Cleanroom

MEMS Technologies Dresden Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
Conferences

MEMS Technologies Dresden Fraunhofer IPMS
Education

MEMS Technologies Dresden Fraunhofer IPMS
Information

MEMS Technologies Dresden Fraunhofer IPMS
Research Laboratory

MEMS Technologies Dresden Fraunhofer IPMS
Product Manufacturer
Design

MEMS Technologies Dresden Fraunhofer IPMS
ASIC Design & Layout Fraunhofer IPMS
MEMS Design & Layout Fraunhofer IPMS
Inspection

MEMS Technologies Dresden Fraunhofer IPMS
Modeling & Analysis

MEMS Technologies Dresden Fraunhofer IPMS
Packaging

MEMS Technologies Dresden Fraunhofer IPMS
Process Design

MEMS Technologies Dresden Fraunhofer IPMS