Product Manufacturer
Chemical Vapor Deposition Systems

Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Vapor Phase Process memsstar
Chemical Vapour Etching (CVE)

Vapor Phase Process memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Coating

Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Dry Etch Release

Solo Platform memsstar
Sentry Platform memsstar
Multi Platform memsstar
Vapor Phase Process memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Molecular Vapor Deposition (MVD®)

Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Vapor Phase Process memsstar
Product Manufacturer
Process Development

Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
HF Sacrificial Vapor Release Etching memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
Research & Development

Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar