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Chemical Vapor Deposition Systems
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Vapor Phase Process memsstar
Chemical Vapour Etching (CVE)
Vapor Phase Process memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Coating
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Dry Etch Release
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Vapor Phase Process memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Molecular Vapor Deposition (MVD®)
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
Vapor Phase Process memsstar
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Process Development
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar
HF Sacrificial Vapor Release Etching memsstar
Xenon DiFluoride (XeF2) Silicon Etching memsstar
Research & Development
Xenon DiFluoride (XeF2) Silicon Etching memsstar
HF Sacrificial Vapor Release Etching memsstar
Anti-Stiction Coatings for Self-Assembled Monolayers (SAM) memsstar