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Bonding Material
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Etch Mask
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Glass Frit
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Glass Wafers
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Packaging
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Polishing Slurry
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Process Carrier
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Protection Coating
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Quartz Wafers
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Sealing Glass
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Silicon Wafers
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Structured Wafers and Substrates
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Batch develop
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Chemical Vapor Deposition Systems
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Chemical Vapour Etching (CVE)
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Cleaning
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Coat Develop and Expose
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Coating
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Deep Reactive Ion Etching (DRIE) Systems
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Deep Silicon Etch Systems
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Dry Etch Release
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Electroetching
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Electroplating
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Lithography
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Manual Wet Bench
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask Aligner
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask and Bonder Aligners
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Metal Lift Off
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Metrology Instrumentation
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Physical Vapor Deposition (PVD) Systems
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Plasma Etching Systems
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Semi Automated Wet Processing System
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Stripping
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Testing
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wafer Bonding
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wet etching
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Design
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Low Volume Fabrication
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Manufacturing Services
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask Layout
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Metal Via
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Modeling
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Packaging
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Pilot Services
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Process Development
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Prototyping
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Research & Development
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Silicon Deep Reactive Ion Etch (RIE)

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Technology Transfer to Foundry
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Through Silicon Via
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wafer Bonding
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Accelerometers
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Inertial sensors Fraunhofer ISIT
Energy
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Flow Sensors
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Gyroscopes
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Inertial sensors Fraunhofer ISIT
Optical MEMS
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
RF-MEMS
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Cleanroom
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Design
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Device Services
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Mask Layout
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Modeling & Analysis
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Packaging
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Process Design
Micro-Mirror / 2d-Scanner Fraunhofer ISIT
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Simulation tools
Micro-Mirror / 2d-Scanner Fraunhofer ISIT