Product Manufacturer
Bonding Material

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Etch Mask

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Getters

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Glass Frit

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Glass Wafers

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Packaging

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Polishing Slurry

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Process Carrier

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Protection Coating

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Quartz Wafers

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Sealing Glass

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Silicon Wafers

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Structured Wafers and Substrates

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Batch develop

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Chemical Vapor Deposition Systems

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Chemical Vapour Etching (CVE)

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Cleaning

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Coat Develop and Expose

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Coating

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Deep Reactive Ion Etching (DRIE) Systems

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Deep Silicon Etch Systems

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Dry Etch Release

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Electroetching

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Electroplating

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Lithography

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Manual Wet Bench

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask Aligner

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask and Bonder Aligners

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Metal Lift Off

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Metrology Instrumentation

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Packaging

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Physical Vapor Deposition (PVD) Systems

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Plasma Enhanced Chemical Vapour Deposition (PECVD)

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Plasma Etching Systems

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Semi Automated Wet Processing System

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Stripping

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Testing

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wafer Bonding

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wet etching

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Design

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Feasability

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Low Volume Fabrication

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Manufacturing Services

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask Layout

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Metal Via

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Modeling

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Packaging

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Pilot Services

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Process Development

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Prototyping

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Research & Development

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Silicon Deep Reactive Ion Etch (RIE)

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Technology Transfer to Foundry

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Through Silicon Via

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Wafer Bonding

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Accelerometers

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Inertial sensors Fraunhofer ISIT
Energy

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Flow Sensors

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Gyroscopes

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Inertial sensors Fraunhofer ISIT
Optical MEMS

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
RF-MEMS

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Cleanroom

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Research Laboratory

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Consulting

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Design

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Device Services

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Inspection

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Mask Layout

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Modeling & Analysis

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Packaging

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Process Design

Micro-Mirror / 2d-Scanner Fraunhofer ISIT
Product Manufacturer
Simulation tools

Micro-Mirror / 2d-Scanner Fraunhofer ISIT