Product Manufacturer
Chemical Vapour Etching (CVE)

SPTS/XACTIX XeF2 etching SPTS Technologies
Deep Reactive Ion Etching (DRIE) Systems

SPTS DRIE systems SPTS Technologies
Inductively Coupled Plasma (ICP)

SPTS ICP SPTS Technologies
Physical Vapor Deposition (PVD) Systems

SPTS PVD SPTS Technologies
Plasma Enhanced Chemical Vapour Deposition (PECVD)

SPTS PECVD SPTS Technologies
Plasma Etching Systems

SPTS APS SPTS Technologies