Product Manufacturer
Design

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Feasability

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Low Volume Fabrication

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Metal Via

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Modeling

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Packaging

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Pilot Services

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Process Development

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Prototyping

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Research & Development

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Silicon Deep Reactive Ion Etch (RIE)

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Technology Transfer to Foundry

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Through Silicon Via

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Wafer Bonding

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Product Manufacturer
Accelerometers

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Functional Sensors

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Gyroscopes

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Optical MEMS

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Pressure Sensors

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Relative Humidity Sensors

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RF-MEMS

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Temperature Sensors

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Product Manufacturer
Education

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Information

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