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Webinar: Piezoelectric MEMS Resonators
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When: 3/26/2015
11:30 AM
Presenter: Gian Piazza, Carnegie Mellon University

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This webinar will offer an overview of the state-of-the-art in piezoelectric MEMS resonators and present thoughts on possible future opportunities for this class of devices with a specific focus on filtering and frequency synthesis applications. The presentation will review the field of piezoelectric MEMS resonators by highlighting the key material and device design developments, and the commercial opportunities that have driven its evolution. Specific attention will be given to aluminum nitride resonators, as there are clear examples of successful commercialization of these devices. The established thin film bulk acoustic resonator (FBAR) and emerging laterally vibrating MEMS resonator technologies will be used as examples to convey how material synthesis, integrated fabrication processes, and device design had all converged to provide the highest performance needed to meet the needs of the wireless market. Remaining challenges in the deployment of some of these resonator technologies will also be described. 


Finally, recent trends in materials and system level integration will be discussed. In particular heterogeneous or direct integration of piezoelectric resonators with electronic circuits will be presented as a research thrust that could potentially lead to new and disruptive system level applications for these devices.


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