The long path from MEMS Resonators to Timing Products
Speaker: Professor Tom Kenny, Stanford University.
Date/Time: Wednesday, Feb. 24th, 2016, 7:00 pm
Location: Texas Instruments Building E Conference Center, 2900
Semiconductor Dr., Santa Clara, CA 95052
Food: Pizza and beverages will be available starting at 6:00 pm for a
donation at the door.
Sponsorship: Contact firstname.lastname@example.org if you are
interested in sponsorship this meeting.
Research on MEMS resonators began over 50 years ago, and has
continued throughout that time, with many successes and many
challenges. In just the last 10 years, there has been a series of important
technological developments, and (finally!) success at commercialization of
MEMS for timing products. This presentation will highlight some key
milestones along this path, describe some of the critical technology steps
that led to MEMS becoming viable for the timing market. The talk will also
outline some of the important steps and decisions that took place within
SiTime and elsewhere that helped us reach a successful outcome.
Bio: Thomas Kenny is the Richard W. Weiland Professor in Mechanical Engineering.
In 1994 he joined the Department of Mechanical Engineering. His group is researching
fundamental issues and applications of micromechanical structures. These devices are
usually fabricated from silicon wafers using integrated circuit fabrication tools. Because
this research field is multidisciplinary in nature, work in this group is characterized by
strong collaborations with other departments, as well as with local industry. Kenny
worked at the NASA Jet Propulsion Laboratory from 1989 to 1993, where his research
focused on the development of electron-tunneling high-resolution microsensors. He is
a member of Bio-X. Kenny is a founder of Cooligy, Inc., a microfluidics chip cooling
components manufacturer, and serves on the Board of Directors of SiTime Corporation
(2004 - Present). He received the BS degree in physics from the University of
Minnesota, Minneapolis and the MS and PhD in physics from the University of
California, Berkeley. He is a fellow of ASME.