MEMS Executive Congress 2008 Sponsors

www.evgroup.com

Founded in 1980, EV Group (EVG) is a global supplier of wafer bonders, aligners, thin wafer-, temporary bonding and debonding-equipment, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets.

EV Group holds the dominant share of the market for wafer bonding and debonding equipment and is a leader in lithography for advanced packaging, MEMS and Nanoimprint Lithography (NIL).

The company's unique Triple i-approach (Invent - Innovate - Implement) is supported by a vertical infrastructure, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume.

Headquartered in St. Florian, Austria, EV Group operates via a global customer support network, with subsidiaries in Tempe, Arizona; Albany, New York; Yokohama and Fukuoka, Japan; and Chung-Li, Taiwan. For more information, visit www.EVGroup.com and our EVG-TShop “Click, Stop – the new way to shop” www.EVGTShop.com.

www.stsystems.com

STS is a manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, and PECVD sources.

In partnership with Primaxx Inc. and XACTIX, Inc., STS also offers HF/methanol and XeF₂ dry vapour etching for MEMS release applications.

These enabling technologies are used by a large installed base of worldwide manufacturers and researchers to fabricate and package a wide range of MEMS/MOEMS and nano-based devices.

In particular, STS is the market-leading supplier of deep reactive ion etch (DRIE) equipment, and has offered their Advanced Silicon Etch (ASE^®) process, which includes patent-protected enhancements, since 1994. All STS' process technologies are available on a range of equipment platforms which give a logical upgrade path from R&D and pilot production to volume production, without the need for process re-qualification.

www.suss.com

SUSS MicroTec is a global supplier of production and test equipment for the semiconductor and related industries SUSS is especially present in markets including Advanced Packaging, MEMS, Compound Semiconductor, Silicon-On-Insulator and 3D Interconnect.

Products include precision lithography tools (mask aligners, spin & spray coaters), wafer bonders as well as test systems.

Our commitment to superior performance, cost effective solutions and high levels of customization have made SUSS equipment both market and technology leaders throughout the world.

In addition to leading the industry in the area of submicron accuracy, we are renowned for our dedication to designing equipment readily adaptable to both unique and rapidly changing manufacturing environments. Our broad product range coupled with our extensive after-sales support result in exceptional relationships with our customers

• Founded 1949 by Karl Suess
• IPO 1999
• Renamed to SUSS MicroTec in 2001
• Sales 2006: €155.5 Million / Order Entry: €153.8 Million
• 5 production sites & 8 strategic sales & service centers worldwide
• Currently approximately 760 employees worldwide

www.planoptik.com

Plan Optik AG, a high tech glass processor, existing since 1972 and based in Germany, has focused more and more on MEMS related products from glass or similar materials (mainly borosilicate glass wafers used for wafer level packaging of MEMS).

Within the last years, Plan Optik - Wafers set the standard for glass wafers of this still young market.

This success is driven by the development of own manufacturing methods e.g. for the polishing of glass wafers. So called MDF (micro damaging free) polished wafers show an impressive surface quality (no sub surface damaging) and are suitable for safety relevant devices such as tyre pressure sensors. No sub-surface-damaging means a dramatically increased yield during etching processes. Additionally the surface roughness is much below 5 Angstrom (0.5 nm) - this makes them suitable for direct bonding.

The chips manufactured with Plan Optiks wafers are already implemented in more than 100 million sensors and micro fluidic systems per year. Our structured wafers are used in active components of micro fluidic and lab-on-chip devices. This includes Nano-Dispensing-Systems and Nano-Vaporizers for medicament administration.

In the near future the technologies developed and used by Plan Optik will set new standards in consumer electronics - especially for mobile phones and DVD pickup heads of the newest generation. Plan Optik is already serving customers in Asia, North America and Europe such as Infineon, Motorola, Samsung, Honeywell, Zeiss and Bosch.

www.maxim-ic.com

Headquartered in Sunnyvale, California, Maxim was established in 1983, became a public company in 1988, and acquired Dallas Semiconductor in 2001.

We serve approximately 35,000 customers worldwide.

Maxim's products are used in a wide variety of microprocessor-based electronics equipment including consumer products, personal computers and peripherals, handheld electronics, wireless and fiber communications, test equipment, instrumentation, video displays, and automotive applications.

At the heart of any electronic product is a digital core that interacts with people, the physical world, its power sources, and other digital systems. Maxim is a worldwide leader in the design, development, and manufacture of the analog and mixed-signal devices that enable all four of these key interactions. For more information, visit www.maxim-ic.com

www.brewerscience.com

Brewer Science is a leading-edge material and equipment supplier to high-technology companies in the semiconductor, MEMS, advanced packaging and nanotechnology industries.

The Brewer Science product portfolio includes ARC® (anti-reflective coating) spin-on coatings for 248nm, 365nm, and 193nm coat products for your advanced lithography applications; ProTEK® temporary etch protective coatings, WaferBOND™ temporary wafer bonding system, carbon nanotube solutions and Cee® (Cost Effective Equipment) benchtop processing equipment.

Please visit www.brewerscience.com to learn more about Brewer Science, Inc. or contact us via email at info@brewerscience.com.

www.schott.com/epackaging

SCHOTT Electronic Packaging, as a business unit of SCHOTT, is a leading manufacturer of housings and other components for the reliable, long-term protection for sensitive electronics.

Vertically integrated, SCHOTT Electronic Packaging provides products and know-how ranging from material science and material processing to dedicated customer support and collaborative supplier/customer partnerships. The company’s core technologies are glass-to-metal and ceramic-to-metal sealing, thermal sensing components as well as a variety of cutting edge specialty glass competences.

With 1,500 employees situated in four production locations as well as several competence centers around the world, local customer support and co-developments for individual packaging solutions are at the heart of the business. SCHOTT Electronic Packaging serves the world’s leading manufacturers in the automotive, data- and telecommunication, sensors and semiconductors, consumer electronics, dental care, home appliances, laser as well as security and tracking industries.

Please visit www.schott.com/epackaging for more information or contact us via email at selpa.singapore@schott.com.

www.okmetic.com

Okmetic is the world´s leading supplier of silicon wafers for high-performance MEMS sensor manufacturing. With the  widest product selection on the market, we offer silicon solutions for the rapidly growing MEMS market. 

Our selection for surface and bulk micromachining, encapsulation and MEMS-IC-integration designs includes double side polished (DSP), single side polished (SSP), epitaxial and bonded silicon on insulator (SOI) wafers.

Also a wide range of services and further developed solutions are included into our product range. Okmetic’s wafers are used in devices for the automotive and aviation industries as well as in medical, industrial and consumer applications and environmental monitoring.

Okmetic has a global customer base and sales network, productions plants in Finland and the US, and contract manufacturers in Japan and in China. Operating systems conform to the requirements of ISO/TS 16949 and ISO 9001:2000.

www.tegal.com

Tegal provides process and equipment solutions to leading edge suppliers of MEMS, advanced semiconductor, and nanotechnology devices.  Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. 

Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cell phones, PDAs and RFID applications; megapixel imaging chips used in digital and cell phone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information about Tegal Corporation, visit: www.tegal.com

www.icemostech.com

IceMos Technology Ltd is a leading supplier of high quality thick film bonded SOI (Silicon On Insulator) substrates.

We offer Bonded SOI Wafers, Si-Si Direct Bonded Wafers, and Dielectrically Isolated Wafers (SOI + Trench and Refill), as well as some MEMS foundry services.

Our expertise is in the area of Deep RIE etching, which we use for trench etching and creating advanced substrates for MEMS. We have the ability to offer trench etch and refill services on bulk Si substrates or on SOI. We work closely with our customers to tailor a substrate solution for their unique MEMS design.

www.tronics.eu

Tronics Microsystems develops and manufactures custom MEMS components and microsystems for high value-add demanding applications in medium unit volume production. 

Tronics Microsystems addresses diverse demanding applications such as medical, instrumentation, defense, and telecommunications. The company is currently involved in the production of several custom high performance accelerometers. Tronics is also developing custom gyrometers, micro-mirrors and BioMEMS and is involved in the development of new potential emerging applications (e.g. RF MEMS). 

www.micralyne.com

Micralyne develops and manufactures MEMS (Micro-Electro-Mechanical-Systems)-based products for leading instrumentation companies worldwide.

With core competencies in several specialized fields including micromachining, thin film technologies, microfluidics, and MEMS assembly & test, technological innovation and know-how are at the foundation of Micralyne’s differential advantage. Target markets include the communications, transportation, energy, and life sciences industries.

Applications of micro/nano products manufactured at Micralyne that are driving significant innovations in all parts of society include:

Micralyne is a profitable and growing company headquartered in Edmonton, Alberta, Canada. Customers include JDS-Uniphase, MicroCHIPS Inc., Kodak, Polychromix, and other market leaders. Registered as an ISO 9001:2000 company, Micralyne operates from a 50,000 square-ft facility and currently employs over 170 people. www.micralyne.com

www.svtc.com

SVTC Technologies provides complete access to a full-scale, 8-inch process development foundry where customers develop their products on silicon with a full complement of advanced CMOS equipment, Development Support Tools and Expertise, and Commercialization Services.

Through superior cycle times, cost-effective development and faster time to revenue, SVTC delivers operational excellence and accelerates the commercialization of innovative technologies to real, manufacturing-ready products for the rapidly growing novel memory and transistor, MEMS/MOEMS, photovoltaic, bio-tech and hi-voltage markets.

www.analog.com/mems

Innovation, performance, and excellence are the cultural pillars on which Analog Devices has built one of the longest standing, highest growth companies within the technology sector.

Acknowledged industry-wide as the world leader in data conversion and signal conditioning technology, Analog Devices serves over 60,000 customers, representing virtually all types of electronic equipment.

Celebrating over 40 years as a leading global manufacturer of high-performance integrated circuits used in analog and digital signal processing applications, Analog Devices is headquartered in Norwood, Massachusetts, with design and manufacturing facilies throughout the world. Analog Devices’ common stock is listed on the New York Stock Exchange under the ticker “ADI” and is included in the S&P 500 Index.

As a pioneer in the micromachine IC industry, ADI produced the first fully-integrated iMEMS® (integrated Micro Electrical Mechanical System) accelerometers and gyroscopes. As a leading MEMS innovator, ADI’s iMEMS Motion Signal Processing™ technology enables a wide range of consumer, automotive and industrial products and simplifies motion sensing design challenges for market leading companies worldwide.

www.freescale.com/sensors

Freescale Semiconductor is a global leader in the design and manufacture of embedded semiconductors for the automotive, consumer, industrial, networking and wireless markets. Freescale is a leading high-volume sensor provider with an extensive portfolio of acceleration, pressure and proximity sensors.

Freescale has offered MEMS (Micro-Electro-Mechanical-Systems)-based sensors for more than 25 years.

The privately held company is based in Austin, Texas, and has design, research and development, manufacturing or sales operations in more than 30 countries. Freescale is one of the world's largest semiconductor companies with 2007 sales of $5.7 billion (USD). For more information, visit www.freescale.com/sensors.

www.memsinvestorjournal.com

MEMS Investor Journal is the only independent publication devoted to providing comprehensive coverage of the latest developments in the rapidly emerging MEMS industry.

Our FREE weekly newsletter is specifically designed for MEMS industry professionals and brings you the top MEMS stories from 7000+ sources worldwide. We cover the most critical developments in the MEMS industry to ensure that our subscribers explore and take advantage of the latest investment, commercializaltion and partnership opportunities. Our newsletter also reports on the most vital newly-granted patents in the MEMS industry.
Benefits and features include:

• Comprehensive MEMS news coverage
• 7-14 MEMS and microsystems news stories every week
• Interviews with MEMS industry leaders
• Latest MEMS patents and patent applications
• Sample chapters from newly published MEMS books
• MEMS classifieds including job posts and equipment
• Latest MEMS whitepapers and presentations
• MEMS CDs, catalogs and vendor literature
• Subscribe today and join our 3800+ subscribers by clicking the link below:

http://www.memsinvestorjournal.com/subscribe.htm

www.marketwire.com

Marketwire is a leading newswire service offering press release distribution, media contact management, multimedia, media monitoring services and other workflow solutions for public relations, investor relations, journalists and other communications professionals.

You need a partner that makes life easy. A newswire that gets it right the first time, every time. One that goes out of its way to answer your questions and provide new tools that really make a difference in your day. That's Marketwire. It's time to take a closer look.