Event Sponsors

November 4-6, 2009 | The Lodge at Sonoma | Sonoma, CA

www.evgroup.com

Founded in 1980, EV Group (EVG) is a global supplier of wafer bonders, aligners, thin wafer-, temporary bonding and debonding-equipment, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets.

EV Group holds the dominant share of the market for wafer bonding and debonding equipment and is a leader in lithography for advanced packaging, MEMS and Nanoimprint Lithography (NIL).

The company's unique Triple i-approach (Invent - Innovate - Implement) is supported by a vertical infrastructure, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume.

Headquartered in St. Florian, Austria, EV Group operates via a global customer support network, with subsidiaries in Tempe, Arizona; Albany, New York; Yokohama and Fukuoka, Japan; and Chung-Li, Taiwan. For more information, visit www.EVGroup.com and our EVG-TShop “Click, Stop – the new way to shop” www.EVGTShop.com.

www.stsystems.com

STS is a manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, and PECVD sources.

In partnership with Primaxx Inc. and XACTIX, Inc., STS also offers HF/methanol and XeF₂ dry vapour etching for MEMS release applications.

These enabling technologies are used by a large installed base of worldwide manufacturers and researchers to fabricate and package a wide range of MEMS/MOEMS and nano-based devices.

In particular, STS is the market-leading supplier of deep reactive ion etch (DRIE) equipment, and has offered their Advanced Silicon Etch (ASE^®) process, which includes patent-protected enhancements, since 1994. All STS' process technologies are available on a range of equipment platforms which give a logical upgrade path from R&D and pilot production to volume production, without the need for process re-qualification.

www.tegal.com

Tegal provides process and equipment solutions to leading edge suppliers of MEMS, advanced semiconductor, and nanotechnology devices.  Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents.

Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cell phones, PDAs and RFID applications; megapixel imaging chips used in digital and cell phone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information about Tegal Corporation, visit: www.tegal.com

www.freescale.com/sensors

Freescale Semiconductor is a global leader in the design and manufacture of embedded semiconductors for the automotive, consumer, industrial, networking and wireless markets. Freescale is a leading high-volume sensor provider with an extensive portfolio of acceleration, pressure and proximity sensors.

Freescale has offered MEMS (Micro-Electro-Mechanical-Systems)-based sensors for more than 25 years.

The privately held company is based in Austin, Texas, and has design, research and development, manufacturing or sales operations in more than 30 countries. Freescale is one of the world's largest semiconductor companies with 2007 sales of $5.7 billion (USD). For more information, visit www.freescale.com/sensors.

www.st.com

ST was one of the first global industrial companies to recognize the importance of environmental responsibility, with its initial efforts beginning in the early 1990s. Since then ST has made outstanding progress in reducing energy and water consumption and CO2 emissions per product unit. Over the past 15 years, the Company’s sites have received more than 100 awards for excellence in all areas of Corporate Responsibility, from quality to corporate governance, social issues and environmental protection.

english.grenoble-isere.com

AEPI, l’Agence d’Etudes et de Promotion de l’Isère, provides complimentary information, introductions & services to assist companies to explore business opportunities in the Grenoble-Isère area of France, Europe's stellar center for research in micro- & nanotechnology, nanobiotech & new energy technologies.

Grenoble is home to the MINATEC scientific campus, whose cornerstone is the CEA-Leti (Electronics & IT laboratory of the French Atomic Energy Commission), as well as Grenoble-born MEMS players such as MEMSCAP, Movea, Tronics, etc.

We can facilitate involvement in Minalogic (cluster for nanotechnologies & miniature intelligent solutions), Tenerrdis (cluster for solar energy, hydrogen & fuel cells, micro energy sources, nanomaterials, & smart energy management) and LyonBioPole (diagnostics, vaccines and new therapies). Competitive clusters offer opportunities for international companies to leverage funding for collaborative projects.

AEPI works closely with cluster anchor labs CEA-Leti , CEA-Liten/INES (Laboratory for Innovation in New Energy Technologies & Nanomaterials & the French National Solar Institute), & with other public & private partners in Grenoble.

www.leti.fr

CEA is a French Research and Technology Organization, with activities in three main areas: Energy, Technologies for Information and Healthcare, and Defense and Security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. 

Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and Microsystems (MEMS) are at the core of its activities. As a major player in the MINATEC® excellence center, Leti operates 8,000-m² state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies.

Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on intellectual property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75 percent of its budget, which totalled 205 M€. For more information, visit www.leti.fr

www.lamresearch.com

Founded in 1980, Lam Research Corporation is a major supplier of wafer fabrication equipment and services to the worldwide semiconductor industry. As a technology and market share leader in plasma etch and single-wafer clean, Lam Research provides customers with innovative solutions for some of today’s most advanced semiconductor processing challenges.

Lam’s leading etch products address a broad range of applications, from conductor and dielectric etch to emerging micro-electromechanical systems (MEMS), deep silicon, and three-dimensional integrated circuit (3 D IC) applications. The Company’s single-wafer cleaning solutions incorporate proprietary spin, linear, and plasma-based technologies, allowing customers to implement customized yield-enhancing solutions.

Headquartered in Fremont, California, Lam Research maintains a global network of service facilities throughout North America, Asia, and Europe to meet the complex and changing needs of its global customer base.

www.amfitzgerald.com

Founded in 2003, A.M. Fitzgerald & Associates, LLC is a MEMS product development firm that provides services in MEMS prototyping and short-run fabrication, multiphysics finite element modeling and fracture prediction, foundry selection and technology transfer, and technology strategy consulting.

We serve clients of all sizes, from startups to Fortune 500 companies, who are seeking MEMS-enabled technology solutions for diverse applications.  We have served over 60 clients to date.

Our goal is to reduce the risk and expense of early stage MEMS development for our clients.  All of our MEMS engineers share a common denominator of years of hands-on fabrication experience, with deep knowledge of design for manufacture and high yield.  Our vertically-integrated engineering services can take client designs all the way from sketches on paper to finished wafers and pave the way for successful ramp-up at a production foundry.

A.M. Fitzgerald & Associates' main office is in San Carlos, CA, near Silicon Valley. Our fab operations are based at both the Stanford Nanofabrication Facility and the UC Berkeley Microlab.  For more information, please visit: www.amfitzgerald.com

www.okmetic.com

Okmetic is the world´s leading supplier of silicon wafers for high-performance MEMS sensor manufacturing. With the  widest product selection on the market, we offer silicon solutions for the rapidly growing MEMS market. 

Our selection for surface and bulk micromachining, encapsulation and MEMS-IC-integration designs includes double side polished (DSP), single side polished (SSP), epitaxial and bonded silicon on insulator (SOI) wafers.

Also a wide range of services and further developed solutions are included into our product range. Okmetic’s wafers are used in devices for the automotive and aviation industries as well as in medical, industrial and consumer applications and environmental monitoring.

Okmetic has a global customer base and sales network, productions plants in Finland and the US, and contract manufacturers in Japan and in China. Operating systems conform to the requirements of ISO/TS 16949 and ISO 9001:2000.

www.waferfabs.org

The FOA is an international, not for profit, trade association of semiconductor fab owners and associates who meet regularly to discuss and act on common manufacturing issues, combining strengths and resources to become more competitive.

www.analog.com/mems

Innovation, performance, and excellence are the cultural pillars on which Analog Devices has built one of the longest standing, highest growth companies within the technology sector.

Acknowledged industry-wide as the world leader in data conversion and signal conditioning technology, Analog Devices serves over 60,000 customers, representing virtually all types of electronic equipment.

Celebrating over 40 years as a leading global manufacturer of high-performance integrated circuits used in analog and digital signal processing applications, Analog Devices is headquartered in Norwood, Massachusetts, with design and manufacturing facilies throughout the world. Analog Devices’ common stock is listed on the New York Stock Exchange under the ticker “ADI” and is included in the S&P 500 Index.

As a pioneer in the micromachine IC industry, ADI produced the first fully-integrated iMEMS® (integrated Micro Electrical Mechanical System) accelerometers and gyroscopes. As a leading MEMS innovator, ADI’s iMEMS Motion Signal Processing™ technology enables a wide range of consumer, automotive and industrial products and simplifies motion sensing design challenges for market leading companies worldwide.

www.micralyne.com

Micralyne develops and manufactures MEMS (Micro-Electro-Mechanical-Systems)-based products for leading instrumentation companies worldwide.

With core competencies in several specialized fields including micromachining, thin film technologies, microfluidics, and MEMS assembly & test, technological innovation and know-how are at the foundation of Micralyne’s differential advantage. Target markets include the communications, transportation, energy, and life sciences industries.

Applications of micro/nano products manufactured at Micralyne that are driving significant innovations in all parts of society include:

Micralyne is a profitable and growing company headquartered in Edmonton, Alberta, Canada. Customers include JDS-Uniphase, MicroCHIPS Inc., Kodak, Polychromix, and other market leaders. Registered as an ISO 9001:2000 company, Micralyne operates from a 50,000 square-ft facility and currently employs over 170 people. www.micralyne.com