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Guide to MEMS at SEMICON West

Paula Doe, SEMI

 Here’s the handy guide to all the MEMS events at SEMICON West, July 13-16 in San Francisco. This year’s show highlights emerging opportunities outside of mainstream CMOS in an Extreme Electronics area, with programs on MEMS, HB-LEDs, nano electronics and printed electronics. Even in a down year, it can be difficult to keep up with all the things going on at the giant semiconductor show, so here’s a cheat sheet of what’s likely to be of interest to MEMS folks, including two conference sessions – including MIG’s MEMS Education Series, the premiere of the MEMS movie, a day of standards working groups, and new online and on-site networking opportunities.

Note that complimentary early registration for the show closes June 5. After that the fee becomes $100. Registration includes all the main SEMICON West programs, though not short courses or workshops. Show goers do still, however, need to sign up online for many popular programs to assure a spot, since space is limited.
 

Monday, July 13

8:00am -5:00pm
MEMS standards meetings
San Francisco Marriott

8:00am-3:00pm
A series of short working sessions on bonding, microtubes, microfluidics, packaging, terminology, and materials characterization.

3:00pm-5:00pm
North American MEMS Committee meeting

1:30-5:00 p.m.
MEMS Industry Group’s Short Course: Insiders Guide to Business Strategy for the MEMS Industry
Walking distance from Moscone - SF State University, Downtown Campus; 835 Market Street
www.memseducationseries.com

 

Tuesday, July 14

10:30-12:40
Opportunities for Growth in MEMS
Extreme Electronics Stage, Moscone North

Yole Développement presents its latest analysis and forecast for the MEMS market and supply chain, and executives from several of the sector’s fastest growing companies and most interesting startups will discuss the applications that they see driving demand going forward. Come see several of your MIG member colleagues as they also present.

10:30–11:00
Jean-Christophe Eloy, Yole Développement
Overview of MEMS markets : Where are the remaining areas of growth potential?

11:00–11:20
Claude Jean, Dalsa
Foundry’s view of the MEMS market

11:20–11:40
Eric Eisenhut, Kionix *MIG Member
Sensor integration is enabling applications and expanding markets

11:40–12:00
Jeff Hilbert, WiSpry *MIG Member
RF-MEMS enable mobile handsets

12:00–12:20
Richard Payne, Pixtronix
TFT glass panel fabrication for MEMS displays and more

12:20–12:40
Andrew Thompson, Proteus Biomedical
Intelligent medicine: Helping to solve the heathcare crisis with MEMS and ICs


12:45
MEMS Meetup
Extreme Electronics Networking Lounge, Moscone North

Gather after the morning session to continue informal discussion with the speakers and the MEMS experts in the audience, on the morning’s topics, and other issues of interest. The new Networking Lounge-- with food cart-- next to the meeting area, provides a social gathering space this year for people of like interests before and after the related programs.

To further facilitate productive connections among industry players, SEMI is also starting an Extreme MEMS online social network group. Though not yet publicly announced or marketed, this group is now live and can be accessed by signing up at www.SemiNeedle.com. Show attendees can also use the SEMICONNECT online match making system, on the SEMICON West website, to search not only for programs and products of interest, but also for people with particular interests or knowledge to connect with at the show.

2:00-5:30
SEMI Standards MEMS packaging workshop on hermeticity
San Francisco Marriott

Experts discuss the new SEMI guide to evaluating hermeticity of MEMS packages, the results of further recent work on best practices to assure reliability, and some roadmaps for next steps. Come see several of your MIG member colleagues as they also present.

2:00-2:30
Ron Foster, axept *MIG Member
SEMI MS8-0309: Guide to Evaluating Hermeticity of MEMS Packages

2:40-3:20
Bontae Han, University of Maryland
Quantitative hermeticity assessment

3:30-4:10
Wolfgang Reinert, Fraunhofer Institute
Effectiveness of different evaluation solutions

4:20-5:00
Richard Kullberg, Vacuum Energy
Areas for future work

5:00-5:30
Question and answer session
 

Wednesday, July 15

10:30-12:30
Strategies to improve profits in MEMS
Extreme Electronics Stage, Moscone North

We’ve invited three of the leading European development foundries to discuss their progress towards more standard process modules to speed time to market, and some suppliers with good ideas for smarter design, more practical dry etch, and more efficient package inspection. Come see several of your MIG member colleagues as they also present.

10:30–10:50
Philip Pieters, IMEC *MIG Member
Developing new MEMS opportunities by employing CMOS

10:50–11:10
Magnus Rimskog, Silex *MIG Member
Standard process platforms revolutionizing MEMS foundry production

11:10–11:30
André Rouzaud, CEA-LETI
Speeding up development with generic approaches and standardization

11:30–11:45
Paul Hammond, Primaxx *MIG Member
Eliminating Stiction: HF vapor MEMS etch release goes mainstream

11:45–12:00
Eugene Karwacki, Air Products and Chemicals
Onsite xenon recovery to reduce COO of XeF2 based etching

12:00–12:15
David Richard ,Vi Technology
High-speed inspection of silicon sensors for foreign materials and placement

12:15–12:30
Stephen Breit, Coventor *MIG Member
Efficient 3D process modeling for MEMS design support

1:00-1:55
World premiere of MEMS: Making Micromachines
SEMI Theatre, Moscone North
Additional showings Wednesday at 4:00 and various times on Thursday.

2:00-4:10
Emerging commercial applications of nanotechnology

3:50-4:10
Michael Roukes, California Institute of Technology
Alliance for Nanosystems VLSI: Platform for CMOS NEMS gas sensors

See www.semiconwest.org for more details.