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SPTS Technologies
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Last updated: 11/21/2016
SPTS Technologies
Equipment Manufacturer
Professional Information
SPTS Technologies
United Kingdom
NP18 2TA  United Kingdom
  Chemical Vapour Etching (CVE), Deep Reactive Ion Etching (DRIE) Systems, Inductively Coupled Plasma (ICP), Physical Vapor Deposition (PVD) Systems, Plasma Enhanced Chemical Vapour Deposition (PECVD), Plasma Etching Systems, Silicon Deep Reactive Ion Etch (RIE)
  SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor industry and related markets. These markets include MEMS, advanced packaging, LEDs, high speed RF on GaAs and power management. Formerly known as SPP Process Technology Systems, the company was acquired by its management in June 2011, backed by European private equity firm Bridgepoint. Prior to the acquisition, SPTS was a wholly-owned subsidiary of Sumitomo Precisions Products Co., Ltd., formed from the merger of Surface Technology Systems (STS) and acquired assets of Aviza Technology in 2009.
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