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OMRON Corporation: D6F Series Mass Flow Sensors
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D6F Series Mass Flow Sensors

Application Environment: Various – including medical, HVAC, instrumentation, energy/fuel cell

Salient Features: MEMS mass flow chip with excellent sensitivity

Specifications/Competitive Advantages: Models from 1 to 50 LPM, plus velocity/clogged filter sensors. Exceptional low flow resolution, high accuracy & repeatability. Some models have an integrated dust segregation system.

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